All Polyimide Heaters

All Polyimide Heaters

Fralock’s Adhesiveless Heater Technologies are unsurpassed in the Semiconductor industry.

Instead of the thick film ceramic or rigid cartridge / tube resistance heaters, Fralock’s All-Polyimide heaters allow for many, independently controlled, zones of heater traces across the entire wafer surface. Independently controlled zones allow for unparalleled thermal consistency across the surface, maximizing the output of each wafer in production. Better thermal control allows fewer surface defects on the wafer, therefore yielding greater wafer throughput .

We offer many options, including thermal barriers and thermal conductive layers within our All Polyimide assemblies.   This adds up to better thermal transfer and more control over the entire assembly. Operating capability from -269°C to + 220°C gives you more latitude in all your processes. (Higher temperatures are possible depending on application) All this without the use of any adhesive of any type.

E-Chuck Heater



For additional information about us or to begin discussions on your project, click our Quote Request, or call 1-800-FRALOCK (372-5625)