Semi Test & Packaging Heaters
Our cooling channel manufacturing capability accommodates the need for vacuum chucking and air cooling, which is generally used or required in high temperature packaging and test applications.
- Sizes up to 8” square or more
- Multi-zone heater and integrated RTD’s for temperature sensing capability
- Ground planes knitted with vias for electrical isolation cages
- Surface vacuum features
- Internal gas delivery passages
- Thermal breaks between heat zones