Leading the Way in Advanced Materials Solutions

Wafer Heaters

As a start-up in this area, Oasis brings a unique capability to this established product. Using multi-layer technology, Oasis can achieve multiple zones for high-temperature applications using its unique capability to screen print its resistance traces on multiple levels and run the traces through the stem so the electrical connections can be made in a much lower temperature area of the assembly. Oasis has also developed Gatorizing, a process to increase the bulk resistivity of AlN at elevated temperatures enhancing e-chuck capability and reducing cross-talk between heater and sensor circuitry.
Wafer Heaters for Semiconductor Manufacturing
Ceramic Wafer Heaters